Being the biggest consumer of very high quality water, known as Ultra Pure Water (UPW), the semi-conductor industry faces substantial water challenges. The industry does not only require large volumes of water with a high standard.
It inherently produces a significant amount of wastewater which needs to meet a minimum standard for disposal or reuse.
We offer a range of different ultrafiltration (UF) membrane modules that are perfectly suited for the pretreatment phase in the process of making ultrapure water (UPW). X-Flow hollow-fiber UF membranes address total suspended solids, turbidity, bacteria and viruses. The well-known X-Flow membrane modules Xiga and Aquaflex are the industry standard for pretreatment reverse osmosis (RO).
Process water treatment
The semi-conductor industry is the largest consumer of ultrapure water (UPW). UPW is essential for cleaning and rinsing the surface of silicon wafers, which are the basis for chips and photovoltaic cells. Typically, the size of the wafer and water quality goes hand-in-hand; smaller wafers require a higher water quality. Trace impurities in UPW can lead to decreased yield and even defects in the wafer. With the continuously shrinking size of wafers, it becomes more and more important to remove trace impurities from UPW, including silica, which is considered to be the most difficult to remove.
Silica exists in water in different forms, such as dissolved, colloidal or granular. Impurities in the water that stay on the surface of the wafer after the water has evaporated can damage the wafer surface. Silica, for instance, can act as an undesired bridge between conducting surfaces. Semi-conductor industry requirements show that the level of silica (SiO2) in UPW may not exceed 0.3 ppb.
Waste water treatment
With the large volumes of water the industry is consuming, it correspondingly produces a large amount of wastewater. Industrial wastewater production, and the potential for aquatic pollution, is closely being monitored by regulatory bodies, which monitor water consumption and quality of the discharged water.
The X-Flow membrane module portfolio includes a series of capillary and tubular membrane modules specifically developed as a robust solution for high effluent quality and small footprint designs in water and wastewater treatment.
The X-Flow capillary membrane modules deliver outstanding performance in process water production and effluent polishing.
The Compact series of (tubular) membranes modules are highly suitable for processes like direct wastewater treatment in both Airlift and Crossflow mode.
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The X-Flow HFS60 is a polymeric ultrafiltration module for the removal of colloidal matter, such as silica, in the treatment of surface water, ground water, and effluent, and pretreatment in demin plants.
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